11. - 13. December 2019
Tokyo Big Sight
3-11-1 Ariake, Koto-ku
Tokyo, Japan 135-0063
Visit us at the German Pavilion at booth #2420
We present our Reticle Management Software (RTCL) which covers the entire reticle and carrier life cycle including mask ordering, CofC validation, incoming qualification, reticle stocker automation, reticle inspection, tracking of movements, status changes, waiver, requal, repell, repair, etc.
Our Mask Vendor Connectivity (MaVen) provides for monitoring of the entire reticle order process, automatic status and ETA updates from the mask house, automatic read-in and plausibility/validation checks of data prep information, reticle order files (e. g. SEMI P10) and CofC files. Automatic emails to configurable groups of engineers can be sent, based on the validation result or other business rules. Corrective actions can be taken, before the reticle is manufactured or shipped, resulting in tremendous savings in both cost and time.
iCADA's Advanced Inspection Management Software (INSP) provides all needed functions for triggering and monitoring of reticle inspections, based on a very flexible counter and timer mechanism. Dynamic cycles per reticle or reticle group can be configured, e. g. to reflect the decreasing inspection cycles after reticle cleaning/repair, when counting the exposure dose to monitor crystal growth and haze. Automatic inspection download and analysis of all reticle inspection results (KLA Starlight/TeraScan, ASML IRIS, CANON PPC, NIKON PPD, Dr. Schenk Pollux, etc.) minimize human errors and insure that your business rules are strictly met. Moreover, inspections can be easily visualized and further evaluated in our advanced Reticle Inspection Management GUI (RIMGui).
The latest developments are our Probe Card Management Software (PCRD) and our generic Durable Management Software (DRBL) which cover the life cycle of durables in testing areas like for probe cards, probe card boards, probe heads and sockets. Furthermore, other generic durable types like saw blades can get managed by the iCADA systems.