November 2015

iCADA's reticle inspection management system (INSP) adds a new set of features

The Reticle Inspection Management System (INSP) of iCADA got enhanced by a rule based adder detection using reference or magnetic inspections. In addition the user is able to review inspection result maps, defect images, analyze and classify defects in one single system. The coordinate transformations on particle and defect positions is one the core functionality of INSP and reliefs the process engineer from routine work.

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